piezoelectric_simulation

Multiphysics FEM-simulation

Hardware & Software

• with ANSYS(R) FEM-program for
• UNIX (DEC-Ultrix, HP-UX) workstations
• and PC-486 (MS-DOS) personal computers

MEMS Micro-sensors

• MEMS-sensors based on silicon resonators with piezoelectric thin-film layers (AlN, ZnO)
• and etched quartz crystals (DETF: Double-Ended Tuning Fork)
• bimorph structures (silicon & PZT ceramic)

FEM - Finite Element Method

Silicon

• piezoelectric simulation of MEMS sensors & actuators
• silicon resonators & actuators (beams, diaphragms, cantilever, etc.)
• with ZnO & AlN piezoelectric thin-film layers for excitation & detection
• hybrid bimorph Si bimorph-structures with PZT ceramics (PoC)
• triple-beam force sensors based on silicon / ZnO thin films

Quartz

• HF-etched quartz crystals with Au electrodes
• use of different quartz cuts
• Double-Ended-Tuning-Fork (DETF)

PZT ceramics

lead zirconium titanate, commonly abbreviated as PZT:

• PZT (Pb[Zr(x)Ti(1-x)]O3), one of the world’s most widely used piezoelectric ceramic materials
• here: Siemens VIBRIT420 (Data sheet 1981), SIEMENS Piezokeramik PZT
• Datenblatt VIBRIT®, Piezoelectric Ceramics from Siemens, Redwitz
• VIBRIT - Piezoceramics from Siemens, Ord.-No.: N-281/5035-101
• https://en.wikipedia.org/wiki/Lead_zirconate_titanate

Further information

Deutsch

• https://katalog.slub-dresden.de/id/0-016158210
• https://tfconsult.com/entwurf-und-auslegung-mikromechanischer-strukturen/
• https://tfconsult.com/fe-modellierung-resonanter-sensoren/
• https://tfconsult.com/berechnung-von-quarz-kraftsensoren/
• https://tfconsult.com/piezoelectric-micro-actuators/

English

• https://tfconsult.com/piezoelectrical-driven-force-sensor/
• https://tfconsult.com/fe-modeling-of-resonant-sensors/
• https://tfconsult.com/microsystems-modeling/

TAG archives

• https://tfconsult.com/tag/piezo/
• https://tfconsult.com/tag/quarz/
• https://tfconsult.com/tag/zno/
• https://tfconsult.com/tag/pzt/

... to be continued !